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| Actuator --- MEMS RF Switch |
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| Description： |
| RF MEMS switch are designed and fabricated with various geometry of hinge, spring,and cantilever beam by using VLSI process, electroplating technique.
The cantilever beam structure is touched with the transmission line by electrostatic actuation. Achieved lowest actuation voltage of the fabricated switches is 3~6 volts.
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| Applications： |
| •Switching networks for phased-array radars |
| •Multi-beam satellite communications systems |
| •Wireless application |
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| Benefits： |
| •Lower actuation voltage |
| •Low cost batch fabrication |
| •High isolation |
| •Low insertion lose |
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