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Passive Components
RF Components
Actuator
Bulk Mircomachnig
"Above IC" Inductor
Voltage Controlled Oscillator (VCO)
MEMS RF Switch
Comb Driver
Passive Components
"Above IC" Inductor
RF Components
Voltage Controlled Oscillator (VCO)
Actuator
MEMS RF Switch
Comb Driver
Bulk Mircomaching
Top view：
RF Components --- Low Pass Filters
Description：
The low-pass filter is made by MEMS inductors and
capacitors.It has higher performance and CMOS
process compatible .
Benefits：
•Small size
•Low cost
•Low insertion loss
•Low insertion loss
