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Film Deposition
Photolithography
Dry Etching
Wet Etching
Microelectroplating
Bulk Micromaching
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Metrology Tools
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Passive Components
RF Components
Actuator
Bulk Mircomachnig
"Above IC" Inductor
Voltage Controlled Oscillator (VCO)
MEMS RF Switch
Comb Driver
Passive Components
"Above IC" Inductor
RF Components
Voltage Controlled Oscillator (VCO)
Actuator
MEMS RF Switch
Comb Driver
Bulk Mircomaching
Passive Components --- "Above IC" Inductor
Description:
•High quality factor︰30@5.2G
•Inductance ︰1 nH ~ 10 nH
•Small Dimensions︰below 400μm x 400 μm
•Frequency:up to 10GHz
Global View:
Electrical Characteristic:
Smith Chart
Inductance, quality factor, and resistance